Apparatus for ejecting liquid droplet, work to be applied thereto, method of manufacturing electro-optic device, electro-optic device, and electronic equipment

ABSTRACT

An apparatus for ejecting liquid droplet includes a suction table for setting a rolled work having a plurality of drawing area arranged in the longitudinal direction by suction, a delivering apparatus for introducing the work into the suction table in a sagged state, a drawing apparatus having functional liquid droplet ejection heads for drawing patterns on respective drawing areas on the work set by suction while relatively moving the functional liquid droplet ejection heads, a winding apparatus for winding the work with the pattern drawn thereon in the sagged state, and a flushing unit having a flushing box for receiving ejection from the functional liquid droplet ejection head so as to be located in at least one of the sagged portions of the work.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to an apparatus for ejecting liquiddroplet for drawing (picturing) a pattern on an elongated work (orworkpiece) by using a functional liquid droplet ejection head, a work tobe applied thereto, a method of manufacturing an electro-optic device,an electro-optic device, and electronic equipment.

2. Description of the Related Art

The apparatus for ejecting liquid droplet (also referred to as theliquid droplet ejection apparatus) includes an X-axis table for moving asuction table (set table) on which a sheet-type board (work) is mountedin the X-axis direction, a Y-axis table for moving the head unit onwhich a functional liquid droplet ejection head is mounted in the Y-axisdirection, and is adapted in such a manner that a predetermined patternis drawn on a board set thereon by driving the functional liquid dropletejection head to discharge or eject while relatively moving the headunit and the board.

The liquid droplet ejection apparatus includes a pair of flushing boxesfor receiving waste ejection from (all the ejection nozzles of) of afunctional liquid droplet ejection head. The pair of flushing boxes aremovably supported by the X-axis table and are disposed with theintermediary of the suction table therebetween in the X-axis direction.Therefore, when the X-axis table is driven, the head unit faces theflushing boxes and the set table (work) in sequence, and then thedrawing operation is continuously carried out after the flushingoperation. In this manner, by carrying out the flushing operation priorto the drawing operation, the functional liquid droplet ejection stateof the functional liquid droplet ejection head can be stabilized,whereby the drawing process with high degree of accuracy is performedwith respect to the work (see, e.g., JP-A-2003-266673).

In order to improve drawing efficiency with respect to the work, thereis contemplated a liquid droplet ejection apparatus of roll-to-rollsystem in which a roll-type work having a plurality of actual drawingareas for drawing a drawing pattern provided in the longitudinaldirection is introduced into a liquid droplet ejection apparatus, anddrawing process is carried out for each actual drawing area whiledelivering (paying out) the work, and then the processed work is woundin sequence. However, in this case, since the work is deliveredcontinuously, the flushing boxes cannot be disposed in the X-direction,which is the delivering direction of the work, and hence the flushingoperation cannot be carried out with respect to the actual drawing areasbefore the drawing operation.

SUMMARY OF THE INVENTION

Therefore, it is an advantage of the invention to provide an apparatusfor ejecting liquid droplet in a roll-to-roll system in which a flushingoperation can be carried out immediately before carrying out the drawingoperation on actual drawing areas provided on roll-type work and inwhich stable drawing with respect to the actual drawing areas isachieved. It also provides a work to be applied thereto, a method ofmanufacturing an electro-optic device, the electro-optic device, andelectronic equipment.

According to one aspect of the invention, there is provided an apparatusfor ejecting liquid droplet for drawing a pattern on a work having aplurality of drawing areas provided in the longitudinal direction, theapparatus comprising: a suction table disposed in a drawing space forsetting the work by suction; a delivering apparatus for delivering thework intermittently for introducing the work onto the suction table in asagged state; a drawing means for drawing a pattern on the work set bysuction by driving the functional liquid droplet ejection head to ejectliquid droplet; a work receiving means for receiving the drawn work in asagged state from the suction table; and a flushing unit including aflushing box for receiving ejection from the functional liquid dropletejection head located at least at one of the sagged portions of thework.

In this arrangement, the flushing box is disposed on one of the saggedportion of the work between the delivering apparatus and the suctiontable, and the sagged portion of the work between the suction table andthe work receiving means. Therefore, by moving the functional liquiddroplet ejection head relatively with respect to the drawing space atthe time of drawing process, the functional liquid droplet ejection headis faced to the flushing box for the flushing operation. In this case,since the suction table and the flushing box are arranged adjacently toeach other, the functional liquid droplet ejection head can carry outthe flushing operation before carrying out the drawing operation withrespect to the work (drawing area) on the suction table. Therefore, inthe drawing operation, the functional liquid can be ejected stably fromthe functional liquid droplet ejection head, whereby drawing on thedrawing area with high degree of accuracy is achieved.

In this case, preferably, the work is provided with alignment marks forcorrecting the positions of the respective drawing areas, and an imagerecognition means for photographing the alignment marks and recognizingthe image, and a θ-table for correcting the position in the horizontalplane of the drawing area with respect to the functional liquid dropletejection head are further provided.

In this arrangement, since the alignment marks are providedcorresponding to the respective drawing areas, θ-correction (positionalcorrection) of the drawing area can be achieved based on the imagerecognition, whereby drawing with high degree of accuracy can beachieved.

In this case, the flushing box is preferably supported by the θ-table.

In this arrangement, when the θ-correction of the suction table iscarried out, the flushing box is also θ-rotated with the suction table.Accordingly, the flushing box can be adequately faced to the actualdrawing area which is corrected in position correspondingly.

In this case, preferably, the flushing box is formed corresponding tothe inclination of the sagged portion on the suction table side.

In this arrangement, the flushing box can be arranged at a position asclose as possible to the suction table without interference betweenbottom portions of the flushing box with the work. Even when the sag isrelatively small, the flushing box can be disposed at the saggedportion.

In this case, the work receiving means preferably winds the work.

In this arrangement, since the work after having gone through thedrawing process is wound into the roll-shape, handling of the work afterthe drawing process can be facilitated.

According to another aspect of the invention, there is provided a workon which drawing is made by the above-described apparatuses for ejectingliquid droplet.

In this arrangement, since the drawing is performed by any one of theabove-described apparatuses for ejecting liquid droplet, the drawingwith high degree of accuracy is provided on the work.

In this case the work is preferably a flexible board with an electronicpart mounted thereon.

In this arrangement, by introducing the roll-type work into theapparatus for ejecting liquid droplet for performing the drawingprocess, the flexible board can be manufactured efficiently.

According to another aspect of the invention, there is provided a methodof manufacturing the electro-optical device. The method is characterizedby forming a film formed portion with functional liquid droplet on thework using the above-described apparatus for ejecting liquid droplet.According to still another aspect of the invention, there is provided anelectro-optical device which is characterized in that the film formedportion is formed on the work by the functional liquid droplet using theabove-described apparatus for ejecting liquid droplet.

In this arrangement, since the above-described apparatus for ejectingliquid droplet is used, the functional liquid can be ejected stably onthe actual drawing area. Therefore, the film formed portion can beformed with high degree of accuracy, and the electro-optical device withhigh degree of accuracy can be manufactured with high efficiency. As theelectro-optical device, a fluid crystal display device, an organic EL(Electro-Luminescence) device, an electron emission device, a PDP(Plasma Display Panel) device, and an electrophoresis display device maybe exemplified. The electron discharge device conceptually includesso-called FED (Field Emission Display) device or SED (Surface-ConductionElectron-Emitter Display) device. The electro-optical device includes adevice for metal wiring formation, lens formation, resist formation, andlight diffuser formation.

The electronic equipment of the invention is characterized in that theelectro-optical device manufactured by the above-described method ofmanufacturing the electro-optical device or the above-describedelectro-optical device is mounted thereto.

In this case, the electronic equipment corresponds to various electricalproducts in addition to mobile phones and personal computers havingso-called flat panel display mounted thereon.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is an explanatory drawing illustrating a apparatus for ejectingliquid droplet according to an embodiment of the invention, in whichFIG. 1A is a plan view of the apparatus for ejecting liquid droplet, andFIG. 1B is an enlarged plan view of a work;

FIG. 2 is an explanatory drawing illustrating a apparatus for ejectingliquid droplet according to the embodiment of the invention, in whichFIG. 2A is a side view of the apparatus for ejecting liquid droplet, andFIG. 2B is an enlarged side view around a set table of the work;

FIG. 3 is a plan view around the head plate;

FIG. 4 is an appearance perspective view of a functional liquid dropletejection heads;

FIG. 5 is a block diagram illustrating a main control system of theapparatus for ejecting liquid droplet;

FIG. 6 is a flowchart showing manufacturing steps of a color filter;

FIG. 7A to FIG. 7E are cross-sectional sketch of the color filter shownin the order of the manufacturing steps;

FIG. 8 is a cross-sectional view of a principal portion showing aschematic structure of a liquid crystal device using the color filter towhich the invention is applied;

FIG. 9 is a cross-sectional view of a principal portion showing aschematic structure of a liquid crystal device using the color filter towhich the invention is applied according to a second example;

FIG. 10 is a cross-sectional view of a principal portion showing aschematic structure of a liquid crystal device using the color filter towhich the invention is applied according to a third example;

FIG. 11 is a cross-sectional view of a display device as an organic ELdevice;

FIG. 12 is a flowchart showing manufacturing processes of the displaydevice as the organic EL device;

FIG. 13 is a process drawing explaining formation of an inorganic banklayer;

FIG. 14 is a process drawing explaining formation of an organic banklayer;

FIG. 15 is a process drawing explaining a process of forminghole-injecting/hole-transporting layers;

FIG. 16 is a process drawing explaining a state in which thehole-injecting/hole-transporting layers;

FIG. 17 is a process drawing explaining a process of forming alight-emitting layer of blue color;

FIG. 18 is a process drawing explaining a state in which thelight-emitting layer of blue color is formed:

FIG. 19 is a process drawing explaining a state in which thelight-emitting layers of the respective colors are formed;

FIG. 20 is a process drawing explaining formation of a cathode;

FIG. 21 is an exploded perspective view of a principal portion of adisplay device as a plasma display device (PDP device);

FIG. 22 is a cross-sectional view of a principal portion of the displaydevice as an electron discharge device (FED device); and

FIG. 23A is a plan view illustrating the portion around the electrondischarging sections of the display device and FIG. 23B is a plan viewshowing a method of forming the same.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Referring now to the accompanied drawings, a description will be madeabout an apparatus for ejecting liquid droplet (also referred to as aliquid droplet ejection apparatus) to which the invention is applied.The liquid droplet ejection apparatus is for manufacturing a flexibleboard to be built in a compact camera, a mobile phone, and so on, andfor forming elements such as a resistance, a coil, or a capacitor (chippart: surface-mounting part) or a metal wiring by discharging functionalliquid including a function material dissolved therein on a flexiblebase film (work) by a fluid eject method using a functional liquiddroplet ejection head.

As shown in FIGS. 1A and 2, the liquid droplet ejection apparatus 1includes functional liquid droplet ejection heads 42, and is providedwith: a drawing apparatus 2 for carrying out drawing (picturing) by thefunctional liquid droplet on the work W; a delivering apparatus 3 fordelivering an elongated work W wound into a roll shape; a feedingapparatus 4 for feeding the work W along a predetermined feeding path;and a winding apparatus 5 for winding the work W. In other words, theliquid droplet ejection apparatus 1 carries out the processing inroll-to-roll system, in which the feeding apparatus 4 feeds the work Wdelivered by the delivering apparatus 3 along the feeding path. Then,after having carried out the drawing process on the work W by thedrawing apparatus 2, part of the work W having gone through theprocessing is fed from the drawing apparatus 2 by the feeding apparatus4, and simultaneously, the work W having gone through the processing andfed by the feeding apparatus 4 is wound in sequence by the windingapparatus 5. Between the delivering apparatus 3 and the feedingapparatus 4, and between the feeding apparatus 4 and the windingapparatus 5, the work is fed in a sagged state. Although not shown inthe drawing, the liquid droplet ejection apparatus 1 is provided with acontrol apparatus 6 for generally controlling the respectiveapparatuses, and the above-described series of operations are carriedout under the control of the control apparatus 6.

On the other hand, as shown in FIG. 1B, the work W introduced into theliquid droplet ejection apparatus 1 includes a plurality of actualdrawing areas “a” on which the predetermined drawing pattern (unitdrawing pattern) is drawn provided at predetermined intervals in thelongitudinal direction. Then, provided between the actual drawing area“a” and the actual drawing area “a” is a pair of (two) work alignmentmarks b corresponding to each actual drawing area “a”. The pair of workalignment marks b are used for θ-correction of the actual drawing areas“a” which are set to a suction table 31, described later, by suction aswell as for data correction in the direction of X and Y axes. The work Wis finally cut in area between the respective actual drawing areas “a”formed with the work alignment marks b. Then, a plurality of flexibleboards are manufactured by carrying out a predetermined process for eachwork W which is cut off by each actual drawing area “a”.

The work W used in this embodiment includes part of a chip component (ormetal wiring) integrated in advance. Therefore, in order to prevent theintegrated chip component from getting damaged when the work W is wound,an elongated spacer sheet S with embossing finish is overlapped on thework W. Therefore, the work is wound into a roll-shape with the spacersheet laminated thereon, and carried in and out.

Subsequently, each unit in the liquid droplet ejection apparatus will bedescribed. As shown in FIG. 1 and FIG. 2, the drawing apparatus 2includes a machine base 11, a drawing means 12 widely placed on theentire area on the machine base 11 and having a functional liquiddroplet ejection heads 42, and a head maintenance unit placed on themachine base 11 so as to be equipped on the drawing means 12.

The drawing means 12 includes a set table 21 for setting the work Wintroduced into the drawing space by the feeding apparatus 4, a headunit 22 on which a plurality of a functional liquid droplet ejectionheads 42 are mounted, a carriage 23 provided with the head unitsuspended therefrom, and the X-Y direction movement mechanism for movingthe head unit 22 in the X-axis direction and the Y-axis direction in thedrawing space via the carriage 23. In the following description, theX-axis direction represents the work W feeding direction (longitudinaldirection of the work W), and the Y-axis direction represents thedirection horizontally orthogonal to the X-axis direction.

The set table 21 is disposed in the drawing space provided so as to facethe feed path of the work W, and includes a suction table 31 for settingthe work W by Suction, and a θ-table 32 for supporting the suction table31 so as to be capable of θ-rotation and being supported by the machinebase 11. Formed on the suction table 31 (setting surface) are aplurality of suction holes (not shown) for sucking the work W. Althoughdetails will be described later, this embodiment is adapted to carry outthe drawing process for each actual drawing area, and the suction table31 is formed into a size on which a single actual drawing area “a” canbe set by suction.

As shown in FIG. 3, the head unit 22 includes a plurality of functionalliquid droplet ejection heads 42 mounted on the head plate 41. As shownin FIG. 4, the functional liquid droplet ejection head 42 is ofso-called twin type, and includes a functional liquid introduction unit51 having twin connecting needles 52, a twin head board 53 continuingfrom the functional liquid introduction unit 51, and a head body 54continuing downwardly of the functional liquid introduction unit 51 andbeing formed with a in-head flow path filed with the functional liquidtherein. The connecting needle 52 is connected to a functional liquidtank out of the drawing and supplies the functional liquid to thefunctional liquid introduction unit 51. The head body 54 includes acavity 55 (piezoelectric element), and a nozzle plate 56 having a nozzlesurface 57 having a number of ejection nozzles 58 opening therethrough.When the functional liquid droplet ejection heads 42 are driven forejection, (a voltage is applied to the piezoelectric element), thefunctional liquid droplets are ejected from the ejection nozzles 58 by apumping action of the cavities 55.

The number of ejection nozzles 58 is arranged at uniform pitches(two-dot pitch intervals), whereby two split nozzle rows are formed, andthe two sprint nozzle rows are shifted by one-dot pitch with from eachother. In other words, the functional liquid droplet ejection head 42 isformed with the nozzle rows at one-dot pitch intervals in the structureof the two split nozzle rows, thereby enabling one-dot pitch (highresolution) drawing.

Arranged on the head plate 41 are the plurality of nozzle rows of thefunctional liquid droplet ejection heads 42 so as to continue (be partlyoverlapped) in the Y-axis direction, and one drawing line is formed bythe nozzle rows of all the functional liquid droplet ejection heads 42.The length of one drawing lien corresponds to the width of the actualdrawing area “a” of the work W described above, so that efficientdrawing can be carried out on the work W.

The carriage 23 includes a carriage body 61 for supporting the head unit22, a θ-rolling mechanism 62 for positional correction (in a horizontalsurface) of the head unit 22 in the θ direction, and a substantiallyI-shaped suspending member 63 for causing the X-Y movement mechanism 24to support the carriage body 61 (head unit 22).

The carriage body 61 includes a pair (two) of work alignment cameras 71for photographing the work W (actual drawing area “a”) mounted via acamera supporting arm 72. In this embodiment, a pair of work alignmentmarks b located on one side adjacent to the actual drawing area “a”which is set to the suction table 31 by suction are used as referencesof alignment. Then, the positional correction of the work W is carriedout so that the pair of work alignment marks b as the references come tothe predetermined position.

The X-Y movement mechanism 24 includes an X-axis table 81 extending inthe X-axis direction, and a Y-axis table 82 supporting the head unit 22via the carriage 23 so as to be capable of sliding in the Y-axisdirection and being configured to be supported by the X-axis table 81and slidable in the X-axis direction.

The X-axis table 81 includes a pair of X-axis movement mechanisms 91,and the respective X-axis movement mechanisms 91 are extended among aplurality of poles 91 provided so as to extend upright from the machinebase 11 and are installed on a pair of supporting bases (not shown)disposed so as to interpose the feed path of the work W therebetween.Although not shown in the drawing, the respective X-axis movementmechanism 91 include an X-axis sliders driven by an X-axis motor, whichconstitute a drive system in the X-axis direction, and ends of theY-axis table 82 are slidably supported by the respective X-axis sliders.

The Y-axis table 82 includes a Y-axis motor (not shown) whichconstitutes a drive system in the Y-axis direction and a Y-axis slider(not shown) driven by a Y-axis motor mounted on the Y-axis supportingplate 93 which is supported at both ends thereof by the pair of X-axissliders of the X-axis table 81, and the Y-axis slider includes acarriage 23 (suspending member 63) so as to be capable of sliding in theY-axis direction.

A series of operation at the time of drawing process will be described.The X-axis table 81 is firstly driven to face the carriage 23 (head unit22) to a predetermined position, and the work W is photographed by awork alignment camera 71. Then, based on the photographed result, theθ-table 32 is driven to carry out the θ-correction of the actual drawingarea “a”, and data correction is carried out in the X-axis direction andthe Y-axis direction.

Subsequently, the X-axis table 81 is driven to move out the head unit 22in the X-axis direction and synchronously, the functional liquid dropletejection heads 42 are driven for ejection for causing the functionalliquid droplets to be selectively ejected. When the moving out of thehead unit 22 is terminated, the Y-axis table 82 is driven and moves thehead unit 22 by a predetermined distance in the Y-axis direction. Then,the X-axis table 81 is driven and synchronously, the functional liquiddroplet ejection heads 42 are driven for ejection, whereby the head unit22 is moved back in the X-axis direction and the functional liquiddroplets are selectively ejected on the work W. In the drawing process,by repeating the movement of the head unit 22 in the X-axis direction,the driving of the functional liquid droplet ejection heads 42 forejection (horizontal scanning), and the movement of the head unit 22 inthe Y-axis direction (vertical scanning) alternatively, the functionalliquid droplet ejection heads 42 move in the drawing space, and unitdrawing patterns are drawn in the actual drawing areas “a” of the work Wset on the suction table 31. The action from starting of the drawingprocess to terminating the drawing of the unit drawing pattern on oneactual drawing area “a” is referred to as “one tact”.

Subsequently, a head maintenance means will be described. The headmaintenance means 13 is for maintaining and restoring the function ofthe functional liquid droplet ejection heads 42, and includes flushingunits 101, a suction unit 102, a wiping unit 103, and an ejectionfailure inspection unit 104. These units are arranged so as to face themovement track of the head unit 22, so that the maintenance operation iscarried out for the functional liquid droplet ejection heads 42 mountedon the head unit 22 from below.

As shown in FIG. 2, the suction unit 102, the wiping unit 103, and theejection failure inspection unit 104 are installed on a commonsupporting stand 105 standing on the machine base 11. The commonsupporting stand 105 includes a common supporting plate 105 a forsupporting the suction unit 102, the wiping unit 103, and the ejectionfailure inspection unit 104, and pole members (not shown) for arrangingin line in the Y-axis direction and supporting both ends of the commonsupporting plate 105 a. A gap is defined between the machine base 11 andthe common supporting plate 105 a, and the work W is delivered throughthe gap to the suction table 31 (see FIG. 2A).

The flushing units 101, which are used for receiving the functionalliquid droplet ejected from all the ejection nozzles 58 of thefunctional liquid droplet ejection heads 42 by waste ejection(flushing), are arranged in the above-described drawing spaces, andinclude a pair of flushing boxes 111 for receiving the functional liquidand a pair of box supporting members 112 for making the suction table 31(or θ-table 32) support each of the pair of flushing boxes 111.

The respective flushing boxes 111 are formed into an elongated box-shapehaving a rectangular plan view, and an absorbing member (not shown) forabsorbing the functional liquid is bedded on the bottom thereof.Although details are described later, the work W fed by the feedingapparatus 4 is adapted to be fed in a state of being sagged downwardlywith the intermediary of the front and rear of the suction table 31, andthe respective flushing boxes 111 are arranged at these sagged portionsnear the suction table 31 (see FIG. 2). The respective flushing boxes111 are formed into a shape similar to the sagged shape of the work Warranged on the side of the suction table 31. Therefore, the bottomportions of the respective flushing boxes 111 do not interfere with thework W, and the respective flushing boxes 111 are arranged near thesuction table 31. Although the part of the work W located on the windingapparatus 5 side with respect to the suction table 31 cannot be saggedsignificantly in order to avoid dripping off of the functional liquidafter drawing, by forming the flushing boxes 111 to have a shape in sideview corresponding to the sag of the work W as in this embodiment, theflushing boxes 111 can be disposed in relatively small space (saggedportion). The shape of sag of the work W is different between the sideof the delivering apparatus 3 and the side of the winding apparatus 5with respect to the suction table 31, and hence the respective flushingboxes have different shapes in side view, respectively (see FIG. 2).

The respective supporting box 112 support the flushing boxes 111 so asto overhung from the suction table 31 so that the respective flushingboxes 111 are located at the sagged portions of the work W with theupper end surfaces thereof flush with a set surface of the suction table31, and so that the respective plashing boxes 111 extend along a pair ofsides (peripheral edge) extending in the Y-axis direction of the suctiontable 31 (on the outside of the work W) (see FIG. 1 and FIG. 2). Sincethe respective box supporting members 112 support the respectiveflushing boxes 111 on the θ-table 32, when the suction table 31 isθ-corrected and rotated, the respective flushing boxes are θ-rotatedtogether.

In this embodiment, an area including the suction table 31 and the pairof flushing boxes 111 disposed so as to interpose the same is set as adrawing space, and when the work W is reciprocated in the X-axisdirection for drawing process, the functional liquid droplet ejectionheads 42 of the head unit 22 face the flushing boxes 111 in sequenceimmediately before facing the work W for carrying out flushing(pre-drawing flushing).

In this embodiment, although the pair of flushing boxes 111 are providedso as to interpose the suction table 31, it is also possible to provideonly one of those. When providing the flushing box at the sagged portionon the delivering apparatus 3 side, it may be installed on theabove-described common supporting frame 105.

As shown in FIG. 1 and FIG. 2, the suction unit 102 is for forcing thefunctional liquid to be ejected from the ejection nozzles 58, andincludes a plurality of caps (not shown) for coming into hermeticalcontact with the nozzle surfaces 57 of the functional liquid dropletejection heads 42, a cap driving mechanism (not shown) for bringing thecaps into and out of contact with the functional liquid droplet ejectionheads 42 (nozzle surfaces 57), and a single suction unit which can suckthe functional liquid droplet ejection heads. 42 (ejector or suctionpump). Suction of the functional liquid is carried out forresolving/preventing clogging of the functional liquid droplet ejectionheads 42 as well as for filling the functional liquid in the functionalliquid flow path extending from the functional liquid feed mechanism tothe functional liquid droplet ejection heads 42 when the liquid dropletejection apparatus 1 is newly provided, or when replacing the heads ofthe functional liquid droplet ejection heads 42.

The caps also have a function of (regular) flushing boxes for receivingfunctional liquid ejected by waste ejection (regular flushing) of thefunctional liquid droplet ejection heads 42 carried out when the drawingprocess with respect to the work W is temporarily stopped, such as thetime of delivering the work W. Then, when one tact of the drawingprocess is terminated, the head unit 22 moves to a position above thehead unit 22 so that the regular flushing is carried out. Accordingly,clogging of the functional liquid droplet ejection heads 42 duringdelivery of the work can be prevented effectively. In this case, thecaps can be moved from the nozzle surfaces 57 of the functional liquiddroplet ejection heads 42 to a position at which the upper surfacesthereof are slightly apart from the nozzle surfaces 57 of the functionalliquid droplet ejection heads 42.

The caps are also used for storing the functional liquid dropletejection heads 42 when the liquid droplet ejection apparatus 1 is not inoperation. In this case, the nozzle surfaces 57 are sealed to preventthe functional liquid droplet ejection heads 42 (ejection nozzle 58)from drying by facing the head unit 22 to the suction unit 102, andbringing the caps into tight contact with the nozzle surfaces 57 of thefunctional liquid droplet ejection heads 42.

The wiping unit 103 is used for wiping off (for carrying out wipingoperation) the nozzle surface 57 of the functional liquid dropletejection heads 42 by a wiping sheet 121 on which cleaning fluid issprayed, and includes a winding apparatus 122 for delivering and windingthe wiping sheet 121 wound into a roll shape and a cleaning fluid feedunit (not shown) for spraying the cleaning fluid on the delivered wipingsheet 12,1, and a wiping unit 124 for wiping the nozzle surfaces 57 withthe wiping sheet 121 on which the cleaning fluid is sprayed.

The wiping operation with respect to the functional liquid dropletejection heads 42 is carried out after having sucked the functionalliquid droplet ejection heads 42 by the suction unit 102, whereby dirtattached to the nozzle surfaces 57 is wiped off. The wiping unit 103 isinstalled between the suction table 31 and the suction unit 102 in theX-axis direction, so as to face the functional liquid droplet ejectionheads 42 which moves to the drawing space for drawing process after thesuction by the suction unit 102, and carry out the wiping operationefficiently (see FIG. 1 and FIG. 2).

The ejection failure inspection unit 104 is for inspecting whether ornot the functional liquid is properly ejected from (the ejection nozzles58 of) all the functional liquid droplet ejection heads 42 mounted onthe head unit 22, and includes a drawn unit 131 for receiving thefunctional liquid ejected from all the ejection nozzles 58 of all thefunctional liquid droplet ejection heads 42 mounted on the head unit 22and causing a predetermined inspection pattern to be drawn thereon, anda image pickup unit (not shown) for photographing the inspection patterndrawn on the drawn unit 131. The result of photographing the inspectionpattern photographed by the image pickup unit is sent to the controlapparatus 6 and recognized as the image and, based on the imagerecognition, a determination is made as to whether or not the respectivedischarging nozzles 58 of the respective functional liquid dropletejection heads 42 eject the functional liquid normally.

The ejection failure inspection unit 104 is also installed between thesuction table 31 and the suction unit 102 (see FIG. 1 and FIG. 2).Therefore, the ejection failure inspection unit 104 faces the head unit22 which is moving to the suction table 31 for regular flushing andcarries out the ejection failure inspection, and hence ejection failureof the functional liquid droplet ejection heads 42 can be inspectedefficiently (without daring to move the head unit 22).

Subsequently, the delivering apparatus 3, the feeding apparatus 4, andthe winding apparatus are described in sequence. As shown in FIG. 1 andFIG. 2, the delivering apparatus 3, being installed on the deliveringapparatus base 141 accompanied to the upstream side of the machine base11, is rotatably journaled by a delivery supporting frame and includes adelivery reel 142 on which the rolled work W is mounted, and a deliverymotor 143 for rotating the delivery reel 142 in the normal and reversedirection. When the delivery motor 143 is driven in the normal directionto rotate the delivery motor 143 in the normal direction, the work W isdelivered to the feeding apparatus 4 from the delivery reel 142.

Provided on the delivery machine base 141 above the delivery reel 142 isa spacer winding reel 151 for winding a spacer sheet S wound around thedelivery reel 142. The spacer winding reel 151 is adapted to wind thespacer sheet S synchronously with the delivery of the work W from thedelivery reel 142 so that only the work W is fed to the feedingapparatus 4. It is also possible to use the delivery motor 143 as thedrive source of the spacer winding reel 151.

Delivery of the work W is carried out in parallel with the drawingprocess described above, and the work W is delivered at the time ofdrawing process by at least a length corresponding to the length of theactual drawing area “a” in the X-axis direction, that is, by a length offeeding of the work W which is sent for the next drawing process (thelength corresponding to one tact). In this case, the delivered work W issagged between the delivery reel 142 and the feeding apparatus 4(delivery-side feeding roller 171: described later). In other words, aspace between the delivery reel 142 and the delivery-side feed roller171 corresponds to a buffer area (space) for the work W. Then, in thisembodiment, a delivery amount detection sensor 161 for detecting thedelivery amount of the work W by detecting the position of the lower endof the sag on the delivery side in this buffer area is provided, wherebydriving of the delivery motor 143 is controlled based on the detectedresult of the delivery amount detection sensor 161. More specifically,the delivery amount detection sensor 161 is arranged at a positioncorresponding to the position of the lower end of the sag on thedelivery side generated when the work W is delivered by the amountcorresponding to one take and, when the delivery amount detection sensor161 detects the position of the lower end of the sag on the deliveryside, driving of the delivery motor 143 is stopped. In this manner, inthis embodiment, since the delivery motor 143 is controlled based on thesagged amount of the sag of the work W on the side of the delivery side,delivery of the work W (by the predetermined amount) can be carried outwithout being affected by the diameter of the roll on the deliveryreel-142.

Since the chip components or the like which is built in the work W inadvance may be destroyed when the work W is sagged, the distance betweenthe delivery reel 142 and the delivery-side feed roller 171 is set sothat the sag on the delivery side does not exceed a predeterminedcurvature R1, and the delivery-side lower-limit sensor 162 for detectingthe position of the lower limit of the lower end of the sag on thedelivery side is provided.

As shown in FIG. 1 and FIG. 2, the feeding apparatus 4 is disposed onthe delivery machine base 141, and includes a delivery-side feed roller171 for receiving the work W delivered from the delivery reel 142, afirst route change roller 172 for changing the route of the work W fedfrom the delivery-side feed roller 171 to pass under the commonsupporting stand 105 (under the common supporting plate 105 a), a secondroute change roller 173 for changing the route of the work W again sothat the work W changed in route by the first route change roller 172 isfed horizontally to the suction table 31, a winding-side feed roller 174disposed on a winding machine base 181 (described later) on which thewinding apparatus 5 is installed for sending the work having finishedthe drawing to the winding apparatus 5 (winding reel 182: describedlater), and a winding-side feed motor (not shown) for rotating thewinding-side feed roller 174 in the normal and reverse directions. Thewinding-side feed motor is composed of a servo motor or a stepping motorwith an encoder, and the amount of delivered work W is obtained from theamount of rotation thereof by the control apparatus 6.

One of the pair of above-described flushing boxes 111 is disposed at anupwardly inclined portion of the work W which is changed in route andfed by the second route change roller 173 and the other flushing box 111is disposed at an inclined portion of the work W fed obliquely downwardfrom the suction table 31. Since the pattern of the functional liquid isalready drawn on the work delivered obliquely downward from the suctiontable 31 by the drawing process, the angle of inclination is set to anangle which avoids dripping off of the functional liquid which isalready drawn on the work W due to the inclination. The winding-sidefeed motor is composed of the servo motor or the stepping motor with theencoder, and the amount of delivered work W is obtained from the amountof rotation thereof by the control apparatus 6.

The feed of the work w by the feeding apparatus 4 is carried out afterhaving finished the drawing process by one tact, and when the one tactof the drawing process is terminated, the winding feed motor is driven.Accordingly, the winding-side feed roller 174 as the drive rollerrotates, and the delivery-side feed roller 171, the first route changingroller 172, and the second route changing roller 173 as driven rollersare rotated. Then, the work feed by the amount corresponding to one tactis carried out, and the work with the pattern already drawn thereon isfed from the set table, and simultaneously, a new portion (actualdrawing area “a”) is fed. As described above, since the work W by theamount corresponding to one tact is already delivered before startingfeeding of the work W in this embodiment, the feeding of the work W canbe carried out quickly with high degree of accuracy without beingaffected by the delivery of the work W by the delivery unit 3.

As shown in FIG. 1 and FIG. 2, the winding apparatus 5 is installed onthe winding machine base 181 accompanied on the downstream side of themachine base 11, and includes a winding reel 182 rotatably journaled onthe winding support frame, not shown, for winding the work fed from awork feeding unit 213 with the pattern already drawn thereon, and awinding motor 183 for rotating the winding reel 182 in the normal andreverse direction. When the winding motor 183 is driven in the normaldirection to rotate the winding reel 182 in the normal direction, thework W from the winding-side feed roller 174 is wound on the windingreel 182.

The winding operation of the work W is carried out in parallel with thedrawing process as in the case of the work delivering operation. Thework W fed (by the amount corresponding to one tack) from the feedingapparatus 4 (winding-side feed roller 174) is fed to the windingapparatus 5 side once in the sagged state. Then, when the feeding of thework is terminated, and the drawing process is started, the windingmotor 183 is driven, and the sagged work W is sound on the winding reel182. In this case, control of the winding motor 183 is also achieved bydetecting the sag (sag on the winding side). More specifically, awinding-amount detection sensor 191 is arranged at a positioncorresponding to the position of the lower end of the sag on the windingside when the work W of an amount corresponding to one take is woundand, when the winding-amount detection sensor 191 detects the positionof the lower end of the sag on the winding side, the driving of thewinding motor 182 is stopped. The feeding apparatus 4 is provided with awinding-side upper-limit sensor 192 for detecting the position of theupper limit of the position of the lower end of the sag on the windingside in order to detect excessive winding of the work W.

Reference numeral 201 shown in the same drawing designates a spacer feedreel for feeding the spacer sheet S, and feeds the spacer sheet S on thework W with the pattern drawn thereon to be wound. The fed spacer sheetS is wound around the winding reel 182 with the work W, and prevents thechip components formed on the work W or the elements or the like formedalready thereon from being destroyed by the drawing process.

The work receiving means recited in claims includes part of the feedingapparatus 4 (winding-side feed roller 174, winding-side feed motor), andthe winding apparatus 5. While this embodiment employs a structure inwhich the work W with the pattern drawn thereon fed delivered from thesuction table 31 by the winding-side feed roller 174 is wound into aroll shape by the winding apparatus, when the process with a separateunit is to be performed continuously, winding of the work W with thepattern drawn thereon is delivered to the separate unit as is withoutcarrying out the winding operation.

Referring now to FIG. 5, a main control system of the liquid dropletejection unit 1 will be described. The liquid drop ejection unit 1includes a drawing unit 211 having the drawing means 12, a headmaintenance unit 212 having the head maintenance means 13, a workdelivering unit 214 having the delivering apparatus 4, a work windingunit 215 having the winding apparatus 5, a detection unit 216 havingvarious sensors of the respective units (the delivery amount detectionsensor 161, the delivery-side lower-limit sensor 162, the winding-amountdetection sensor 191, the winding-side upper-limit sensor 192, and soon) for carrying out various types of detection, a drive unit 217 havingthe various drivers for driving the respective sections, and a controlunit 218 (control apparatus 6) connected to the respective sections forcontrolling the entire liquid droplet ejection unit 1.

The control unit 218 includes an interface 221 for connecting therespective sections, a RAM 222 having a storage area capable of storingtemporarily and being used as a working area for control process, a ROM223 having various storage areas for storing control program or thecontrol data, a hard disk 224 for storing drawing data for drawing thepattern on the work W or various data from the respective units as wellas program or the like for processing the various data, a CPU 225 forcalculating the various data according to the program or the like storein the ROM 223 or the hard disk 224, and a bus 226 for connecting thesemembers with respect to each other.

The control unit 218 inputs the various data sent from the respectiveunits via the interface 221 and make the CPU 225 calculates according tothe program stored in the hard disk 224 (or read from the external inputunit such as the CD-ROM drive or the like), and then outputs theprocessed result to the respective units via the interface 221.Accordingly, the respective units are totally controlled whereby aseries of processes with respect to the work described above is carriedout.

As described thus far, according to the liquid droplet ejectionapparatus 1 according to this embodiment, since the work W is saggedupstream and downstream of the suction table 31 in the X-axis direction,which is the direction of delivery of the work W, and the flushing boxes111 are arranged at the sagged portions, all the functional liquiddroplet ejection heads 42 mounted on the head unit 22 is caused to carryout the pre-drawing flushing at the time of drawing process, wherebystable drawing on the actual drawing areas “a” on the work W isachieved.

While the liquid droplet ejection unit of the invention can be used forforming an element such as a resistance, a coil, or a capacitor, or ametal wiring, the process for forming these members are to be carriedout independently. By introducing the specific functional liquid whichmeets the object to each of a plurality of the liquid droplet ejectionapparatuses corresponding to the respective processes and introducingthe work into the fluid drop discharging devices corresponding to therespective processes in a predetermined order for making them to drawthe pattern thereon, these elements and wiring are formed on the work Win sequence.

Exemplifying now a color filter, a liquid crystal display device, anorganic EL device, a plasma display (PDP device), an electron-emittingdevice (FED device, SED device) as the electro-optical device (flatpanel display) manufactured using the liquid droplet ejection apparatus1 according to this embodiment, and also an active matrix board or thelike formed in these display devices, the structures thereof and themethod of manufacturing the same will be described. The active matrixboard represents a board formed with a thin-film transistor and a sourcewiring and data wiring to be electrically connected to the thin-filmtransistor.

A method of manufacturing the color filter to be built in the liquidcrystal display device or the organic EL device will be described nowFIG. 12 is a flowchart showing the process of manufacturing the colorfilter, FIG. 7 is a pattern cross-section of a color filter 600 (filterbase substrate 600A) in this embodiment shown in the sequence of themanufacturing process.

Firstly, in a black matrix forming step (S101), as shown in FIG. 7A, ablack matrix 602 is formed on the substrate (W) 601. The black matrix602 is formed of chromium metal, a layered member of chromium metal andchrome oxide, resin black, and so on. In order to form the black matrix602 formed of a metal thin film, a sputtering process, an evaporatingmethod, and the like can be employed. In order to form a black matrix602 formed of resin thin film, a gravure printing method, a photoresistmethod, a thermal-transfer method, and so on may be employed.

Subsequently, in a bank forming process (S102), a bank 603 is formed ina state of being overlapped on the black matrix 602. In other words, asshown in FIG. 7B, a resist layer 604 formed of a transparentphoto-sensitive resin of a negative type is formed so as to cover thesubstrate 601 and the black matrix 602. Then, an exposure process iscarried out in a state in which the upper surface thereof is coated witha mask film 605 formed into the matrix pattern shape.

Then, as shown in FIG. 7C, patterning is carried out on the resist layer604 by etching the unexposed portion thereof to form a bank 603. Whenthe black matrix is formed by the resin black, the black matrix can alsobe used as the bank.

The bank 603 and the black matrix 602 below the bank 603 serves as apartitioning wall portion 607 b for partitioning respective pixel areas607 a and defines receiving areas for receiving the functional liquiddroplets when forming the colored layer (film formed portions) 608R,608G, 608B by the functional liquid droplet ejection heads 402 in thecolored layer forming process coming later.

By performing the above-described black matrix forming step and the bankforming step, the above-described filter base substrate 600A isobtained.

In this embodiment, a resin material which provides the coated layerwith lyophobic (hydrophobic) property is used as a material of the bank603. Since the surface of the substrate (glass substrate) 601 has alyophilic (hydrophilic) property, positional accuracy when receiving thefluid drops into the respective pixel areas 607 a surrounded by the bank603 (partitioning wall portion 607 b) in the colored layer forming step,described later is improved.

Subsequently, in the colored layer forming step (S103), as shown in FIG.7D, the functional liquid drops are ejected from the functional liquiddroplet ejection heads 42 and received in the respective pixel areas 607a surrounded by the partitioning wall portion 607 b. In this case, thefunctional liquid (filter material) of three colors of R, G and B isintroduced using the functional liquid droplet ejection heads 42 tocarry out ejection of the functional liquid droplets. The array patternsof R, G, and B include a stripe array, a mosaic array, and delta array.

Subsequently, the functional liquid is fixed by the drying process(process such as heating), and the colored layers of three colors 608R,608G, and 608B are formed. After having formed the colored layers 608R,608G, and 608B, the procedure goes to the protective film forming step(S104) and, as shown in FIG. 7E, the protective film 609 is formed so asto coat the upper surfaces of the substrate 601, the partitioning wallportion 607 b and the colored layers 608R, 608G, 608B.

In other words, after application liquid for protective film has appliedon the entire surface of the substrate 601 on which the colored layers608R, 608G, and 608B are formed, and the substrate goes through thedrying step, whereby the protective film 609 is formed.

After having formed the protective film 609, the color filter proceedsto a subsequent film attaching step of ITO (Indium Tin Oxide) as atransparent electrode.

FIG. 8 is a cross-sectional view showing a schematic structure of apassive matrix type liquid crystal device (liquid crystal device) as anexample of the liquid crystal display device employing theabove-described color filter 600. A transmissive liquid crystal displaydevice as a final product is obtained by mounting the additionalelements such as an IC for driving the liquid crystal, a back light, andthe supporting member to the liquid crystal device 620. Since the colorfilter 600 is the same as the one shown in FIG. 7, corresponding partsare represented by the same reference numerals and description will beomitted.

The liquid crystal device 620 is schematically composed of the colorfilter 600, an opposing substrate 621 formed of a glass substrate or thelike, and a liquid crystal layer 622 formed of STN (Super TwistedNematic) liquid crystal composition interposed therebetween, and thecolor filter is arranged on the upper side in the drawing (viewer side).

Although not shown in the drawing, deflecting plates are disposedrespectively on the outer surfaces (surfaces on the opposite side fromthe liquid crystal layer 622) of the opposing substrate 621 and thecolor filter 600, and a back light is disposed on the outer side of thedeflecting plate located on the opposing substrate 621 side.

Formed on the protective film 609 (liquid crystal layer side) of thecolor filter 600 are a plurality of first electrodes 623 of arectangular shape elongated in the lateral direction in FIG. 8 atpredetermined intervals, and a first orientation layer 624 is formed soas to cover the surfaces of the first electrodes 623 on the oppositeside from the color filter 600.

On the other hand, formed on the surface of the opposing substrate 621opposing to the color filter 600 are a plurality of second electrodes626 of a rectangular shape elongated in the direction orthogonal to thefirst electrodes 623 of the color filter 600 at predetermined intervals,and a second orientation layer 627 is formed so as to cover the surfacesof the second electrodes 626 on the liquid crystal layer 622 side. Thefirst electrodes 623 and the second electrodes 626 are formed oftransparent conductive material such as ITO.

Spacers 628 provided in the liquid crystal layer 622 are members formaintaining the thickness (cell gap) of the liquid crystal layer.622uniform. A sealing member 629 is a member for preventing liquid crystalcomponent in the liquid crystal layer 622 from leaking outside. One endof each first electrode 623 extends to the outside of the sealing member629 as an extension wiring 623 a.

Then, the portions where the first electrodes 623 intersect with thesecond electrodes 626 are pixels, and it is adapted in such a mannerthat the colored layers 608R, 608G, 608B of the color filter 600 arelocated at the portions corresponding to the pixels.

In the normal manufacturing process, patterning of the first electrodes623 and application of the first orientation layer on the color filter600 is carried out to form the portion on the color filter 600 side, andseparately, patterning of the second electrodes 626 and application ofthe second orientation layer 627 is carried out to form the portion onthe opposing substrate 621 side. Subsequently, the spacer 628 and thesealing member 629 are formed in the portion on the opposing substrate621 side and, in this state, the portion of the color filter 600 side isadhered. Subsequently, liquid crystal which constitutes the liquidcrystal layer 622 is filled from an inlet port of the sealing member 629and the inlet port is closed. Then, the both deflecting plates and theback light are layered.

According to the liquid droplet ejection apparatus 1 of the embodiment,for example, it is possible to apply the spacer material (functionalliquid) which constitutes a cell gap described above and apply theliquid crystal (functional liquid) uniformly in the area surrounded bythe sealing member 629 before adhering the portion on the color filter600 side to the portion on the opposing substrate 621 side. It is alsopossible to perform printing of the sealing member 629 by the functionalliquid droplet ejection heads 42. Furthermore, it is also possible toapply the both first and second orientation layers 624, 627 by thefunctional liquid droplet ejection heads 42.

FIG. 9 is a cross-sectional view of a principal portion showing aschematic structure of a second example of the liquid crystal deviceemploying the color filter 600 manufactured in this embodiment.

A point significantly different from the above-described liquid crystaldevice 620 is the fact that the color filter 600 is arranged on thelower side in the drawing (opposite side from the viewer).

The liquid crystal device 630 generally includes a liquid crystal layer632 formed of STN liquid crystal interposed between the color filter 600and the opposing substrate 631 formed of a glass substrate or the like.Although not shown in the drawing, the deflecting plates or the like arearranged respectively on the outer surfaces of the opposing substrate631 and the color filter 600.

Formed on the protective film 609 (on the liquid crystal layer 632 side)of the color filter are a plurality of first electrodes 633 of arectangular shape elongated in the depth direction of the drawing atpredetermined intervals, and a first orientation layer 634 is formed soas to cover the surfaces of the first electrodes 633 on the liquidcrystal layer 632 side.

Formed on the surface of the opposing substrate 631 opposing to thecolor filter 600 are a plurality of second electrodes 636 of arectangular shape extending in the direction orthogonal to the firstelectrodes 633 on the color filter 600 side at predetermined intervals,and the second orientation layer 637 is formed so as to cover thesurface of the second electrode 636 on the liquid crystal layer 632side.

The liquid crystal layer 632 is provided with spacers 638 for keepingthe thickness of the liquid crystal layer 632 uniform, and a sealingmember 639 for preventing the liquid crystal composition in the liquidcrystal layer 632 from leaking outside.

Then, as in the case of the above-described liquid crystal device 620,the portions where the first electrodes 633 and the second electrodes636 are intersected with each other are pixels, and it is adapted insuch a manner that the colored layers 608R, 608G, 608B of the colorfilter are located at the portions corresponding to the pixels.

FIG. 10 shows a third example in which the liquid crystal device isconfigure by employing the color filter 600 to which the invention isapplied, and is an exploded perspective view showing a schematicstructure of the transmissive TFT (Thin Film Transistor) liquid crystaldevice.

In the liquid crystal device 650, the color filter 600 is arranged onthe upper side in the drawing (viewer side).

The liquid crystal device 650 generally includes the color filter 600,the opposing substrate 651 arranged so as to oppose thereto, a liquidcrystal layer, not shown, interposed therebetween, a deflecting plate655 arranged on the upper side (viewer side) of the color filter 600,and a deflecting plate (not shown) disposed on the lower side of theopposing substrate 651.

Formed on the surface of the protective film 609 of the color filter 600(surface on the opposing substrate 651 side) is an electrode for drivingthe liquid crystal. The electrode 656 is formed of transparentconductive material such as ITO, and is a surface electrode which coversthe entire area on which the pixel electrodes 660, described later, areformed. An orientation layer 657 is provided in a state of covering thesurface of the electrode 656 opposite from the pixel electrodes 660.

Formed on the surface of the opposing substrate 651 opposing the colorfilter 600 is an insulating layer 658, and scanning lines 661 and signallines 662 are formed on the insulating layer in a state of orthogonal toeach other. Pixel electrodes 660 are formed in the areas surrounded bythe scanning lines 661 and the signal lines 662. Although theorientation layer is provided on the pixel electrodes in the actualliquid crystal device, it is not shown in the drawing.

Thin film transistors 663 having source electrodes, drain electrodes,semiconductors, and gate electrodes are integrated in portionssurrounded by a notched portion of the pixel electrode 660, the scanningline 661 and the signal line 662. The thin film transistor 663 isadapted to be turned on and off by application of signals to thescanning lines 661 and the signal lines, thereby controlling powersupply of the pixel electrodes 660.

Although the liquid crystal devices 620, 630, and 650 in the abovedescribed respective examples are of transmissive type, it is alsopossible to configure into a reflective liquid crystal device or atransflective liquid crystal device by providing a reflective layer or atransflective layer.

FIG. 11 is a cross-sectional view showing a principal portion of thedisplay area of the organic EL device (hereinafter, simply referred toas a display device 700).

The display device 700 generally includes a circuit element portion 702,a light-emitting element portion 703, and a cathode 704 layered on thesubstrate (W) 701.

In this display device 700, light emitted from the light-emittingelement portion 703 toward the substrate 701 is transmitted through thecircuit element portion 702 and the substrate 701 and emitted toward theviewer, and light emitted from the light-emitting element portion 703toward the opposite side of the substrate 701 is reflected by thecathode 704, transmitted through the substrate 701, and emitted towardthe viewer.

A base protective film 706 formed of a silicon oxide film is formedbetween the circuit element portion 702 and the substrate 701, andisland shaped semiconductor films 707 formed of polycrystalline siliconeare formed on the base protective film 706 (on the light-emittingportion 703 side). A source area 707 a and a drain area 707 b are formedon the left and right area of the semiconductor film 707 respectively byhigh-concentration cationic ion plantation. The center portion on whichthe cationic ion is not planted corresponds to a channel area 707 c.

The circuit element portion 702 is formed with a transparent gateinsulating film 708 for covering the base protective film 706 and thesemiconductor film 707, and gate electrodes 709 formed for example ofAl, Mo, Ta, Ti, W or the like are formed at positions corresponding tothe channel areas 707 c of the semiconductor film 707 on the gateinsulating film 707. A first inter-layer insulating film 711 a and asecond inter-layer insulating film 711 b, which are transparent, areformed on the gate electrodes 706 and the gate insulating layer 708.Contact holes 712 a 712 b which penetrates the first and secondinter-layer insulating films 711 a, 711 b to be in communication withthe source areas 707 a and the drain areas 707 b respectively areformed.

Transparent electrodes 713 formed of ITO are formed by patterned into apredetermined shape on the second inter-layer insulating film 711 b, andthe pixel electrodes 713 are connected to the source areas 707 a throughthe contact holes 712 a.

Power source lines 714 are disposed on the first inter-layer insulatingfilm 711 a, and the power source lines 714 are connected to the drainareas 707 b through the contact holes 712 b.

In this manner, the circuit element portion 702 is formed with thethin-film transistors 715 for driving connected to the respective pixelelectrodes 713, respectively.

The light-emitting element portion 703 generally includes functionallayers 717 which are layered on the plurality of pixel electrodes 713respectively, and bank portions 718 provided between the respectivepixel electrodes 713 and the functional layers 717 for partitioning therespective functional layers 717.

The light-emitting element is composed of the pixel electrodes 713, thefunctional layers 717 and the cathodes 704 disposed on the functionallayers 717. The pixel electrodes 713 are formed substantially into arectangular shape in plan view by patterning, and the bank portions 718are formed between the respective pixel electrodes 713.

The bank portion 718 includes an inorganic bank layer 718 a formed ofinorganic material such as SiO, SiO₂, TiO₂ (first bank layer), anorganic bank layer 718 b of trapezoidal shape in cross section layeredon the inorganic bank layer 718 a and formed of resist which is superiorin heat resistant property and solvent resistant property such asacrylic resin or polyimide resin or the like (second bank layer). Thebank portion 718 is partly formed to climb on the peripheral edge of thepixel electrode 713.

Formed between the respective bank portions 718 are openings 719 openingso as to increase in width gradually upward with respect to the pixelelectrodes.

The functional layers 717 include hole-injecting/hole-transportinglayers 717 a formed on the pixel electrodes 713 in the openings 719 in alayered state, and light-emitting layers 717 b formed on thehole-injecting/hole-transporting layers 717 a. It is also possible tofurther form an additional functional layers adjacent to thelight-emitting layers 717 b having another function. For example, it isalso possible to form an electron transporting layers.

The hole-injecting/hole-transporting layers 717 a have a function totransport the positive hole from the pixel electrode 713 side and fillthe same into the light-emitting layers 717 b. Thehole-injecting/hole-transporting layers 717 a are formed by discharginga first composition (functional liquid) including the positive holefilling/transporting layer forming material. The positive holefilling/transporting layer forming material used here is a publiclyknown material.

The light-emitting layers 717 b are layers emitting light in any one ofred (R), green (G), or blue (B), and are formed by discharging thesecond composition (functional liquid) including the light emittinglayer forming material (light emitting material). As a solvent of thesecond composition (nonpolar solvent), a publicly known material whichis insoluble with respect to the hole-injecting/hole-transporting layers717 a are preferably used, and by using such an insoluble solvent forthe second composition of the light-emitting layers 717 b, thelight-emitting layers 717 b can be formed without allowing thehole-injecting/hole-transporting layers 717 to be dissolved again.

Then, the light-emitting layers 717 b are adapted to emit light by thepositive hole filled from the hole-injecting/hole-transporting layers717 a and the electrons filled from the cathode 704 combined again inthe light-emitting layers.

The cathode 704 is formed in a state of covering the entire surface ofthe light emitting element portion 703, and serves to flow a current tothe, function layers 717 with the pixel electrodes 713 in pair. Asealing member, not shown, is arranged on top of the cathode 704.

Subsequently, referring to FIG. 12 to FIG. 20, the manufacturing processof the above-described display device 700 will be described.

As shown in FIG. 12, this display device 700 is manufactured through abank portion forming step (S111), the surface processing step (S112), ahole-injecting/hole-transporting layer forming step (S113), alight-emitting layer forming step (S114), and an opposite electrodeforming step (S115). The manufacturing process is not limited to the oneshown as an example, and some of the steps may be omitted or some othersteps may be added as needed.

In the bank portion forming step (S111), as shown in FIG. 13, aninorganic bank layers 718 a are formed on the second inter-layerinsulating film 711 b. The inorganic bank layers 718 a are formed byforming the inorganic films at an involved positions and then patterningthe inorganic films with a photolithography technique. At this time, theinorganic bank layers 718 a are formed so as to be partly overlappedwith the peripheral portions of the pixel electrodes 713.

After having formed the inorganic bank layers 718 a, as shown in FIG.14, the organic bank layers 718 b are formed on the inorganic banklayers 718 a. The organic bank layers 718 b are also formed bypatterning with the photolithography technique as in the case of theinorganic bank layers 718 a.

The bank portions 718 are formed in this manner. In association withthis procedure, the openings 719 opening upward with respect to thepixel electrodes 713 are formed between the respective balk portions718. The openings 719 define the pixel areas.

In the surface processing step (S112), processing to provide lyophilicproperty and liquid repellent property is carried out. Areas to besubjected to the processing to provide the lyophilic property are firstlayer portion 718 a a and the electrode surfaces 713 of the pixelelectrodes 713, and the surfaces of these areas are processed by plasmaprocessing, for example, with oxygen as processing gas to have lyophilicproperty. The plasma processing also serves to clean the ITO as thepixel electrodes 713.

The processing to provide liquid repellent property is carried out onthe wall surfaces 718s of the organic bank layers 718 b and the uppersurfaces 718t of the organic bank layer 718 b, and the surfaces arefluoridated (processed to have liquid repellent property) by plasmaprocessing with 4 methane fluoride as processing gas.

With this surface processing, the functional liquid droplets can bereceived certainly in the pixel areas when the functional layers 717 areformed using the functional liquid droplet ejection heads 42, and thefunctional liquid droplets received in the pixel areas can be preventedfrom spilling over the openings 719.

Then, by going through the steps described above, the display devicebase body 700A is placed on a set table 21 of the liquid dropletejection apparatus 1 shown in FIG. 1, and ahole-injecting/hole-transporting layer forming step (S113) and alight-emitting layer forming step (S114) shown below are carried out.

As shown in FIG. 15, in the hole-injecting/hole-transporting layerforming step (S113), the first composition including the positive holefilling/transporting layer forming material is ejected into therespective openings 719 from the functional liquid droplet ejectionheads 42. Subsequently, as shown in FIG. 16, the drying process andheat-treatment are carried out for drying off the polar solventcontained in the first composition, whereby thehole-injecting/hole-transporting layers 717 a are formed on the pixelelectrodes (electrode surfaces 713 a) 713.

The light-emitting layer forming step (S114) will now be described. Inthis light-emitting layer forming step, as described above, non-polarsolvent which is insoluble with respect to thehole-injecting/hole-transporting layers 717 a is used as the solvent ofthe second composition used for forming the light-emitting layers inorder to prevent the hole-injecting/hole-transporting layers 717 a frombeing dissolved again.

However, on the other hand, since the hole-injecting/hole-transportinglayers 717 a are low in affinity with respect to the non-polar solvent,even when the second composition containing the non-polar solvent isejected on the hole-injecting/hole-transporting layers 717 a, thehole-injecting/hole-transporting layers 717 a and the light-emittinglayers 717 b may not be brought into tight contact with each other, orthe light-emitting layers 717 b may not be applied uniformly.

Therefore, in order to improve affinity of the surfaces of thehole-injecting/hole-transporting layers 717 a with respect to thenon-polar solvent and the light-emitting layer forming material, thesurface treatment (surface reforming treatment) is preferably carriedout before forming the light-emitting layer. The surface treatment iscarried out by applying a surface reforming material which is the samesolvent as the non-polar solvent of the second composition used whenforming the light-emitting layer or the solvent similar thereto on thehole-injecting/hole-transporting layers 717 a, and letting them to dry.

After this treatment, the surfaces of thehole-injecting/hole-transporting layers 717 a have a predilection forthe non-polar solvent, whereby the second composition containing thelight-emitting layer forming material can be applied uniformly on thepositive hole-injecting/hole-transporting layers 717 a in a subsequentstep.

Then, as shown in FIG. 17, the second composition containing thelight-emitting layer forming material corresponding to any one of thecolors (blue (B) in the example in FIG. 17) is shot into the pixel areas(opening portions 719) as the functional liquid droplets by apredetermined amount. The second composition shot into the pixel areasare spread on the hole-injecting/hole-transporting layers 717 a andfilled in the openings 719. When the second composition is deviated fromthe pixel areas and received by the upper surfaces 718t of the bankportions 718, since the upper surfaces 718t are provided with liquidrepellent property as described above, the second composition can easilytumble into the openings 719.

Subsequently, by carrying out the drying step, the second compositionafter ejection is dried, and hence the non-polar solvent contained inthe second composition is also dried off, whereby the light-emittinglayers 717 b are formed on the hole-injecting/hole-transporting layers717 a. In the case shown in FIG. 18, the light-emitting layers 717 bcorresponding to blue (B) color are formed.

In the same manner, as shown in FIG. 19, the same steps as in the caseof the light-emitting layers 717 b corresponding to the blue (B) colordescribed above are carried out in sequence, whereby the light emittinglayers 717 b corresponding to other colors (red (R) and green (G)) areformed. The order of formation of the light-emitting layers 717 are notlimited to that shown in the example, and may be formed in any order.For example, it is also possible to determine the order of formationaccording to the light-emitting layer forming material. The arraypatterns of the three colors R, G, B include the stripe array, themosaic array, and the delta array.

As described above, the functional layers 717, that is, thehole-injecting/hole-transporting layers 717 a and the light-emittinglayers 717 b are formed on the pixel electrodes 713. Then, the proceduregoes to the opposite electrode forming step (S115).

In the opposite electrode forming step (S115), as shown in FIG. 20, acathode 704 (opposite electrode) is formed on the entire surface of thelight emitting layers 717 b and the bank layer 718 b by, for example,the evaporating method, the sputtering process, and the CVD method. Thecathode 704 in this embodiment is configured of, for example, laminationlayer including the calcium layer and the aluminum layer.

Provided on top of the cathode 704 are Al film, Ag film as electrodesand a protective layer such as SiO₂ or SiN for preventing oxidationthereof as needed.

After having formed the cathode 704 in this manner, other processes suchas the sealing process for sealing the top of the cathode 704 by thesealing member or the wiring process are carried out to obtain thedisplay device 700.

Subsequently, FIG. 21 is an exploded perspective view showing aprincipal portion of the plasma display device (PDP device: hereinafter,referred to simply as a display device 800). In this drawing, thedisplay device 800 is shown in a state of being partly broken.

The display device 800 generally includes a first substrate 801 and asecond substrate 802 arranged so as to face each other, and aelectric-discharge display unit 803 formed therebetween. Theelectric-discharge display unit 803 includes a plurality ofelectric-discharge chambers 805. Three electric-discharge chambers 805including a red electric-discharge chamber 805R, a greenelectric-discharge chamber 805G, and a blue electric-discharge chamber805B out of these plurality of electric-discharge chambers 805constitute a group which corresponds to one pixel.

Address electrodes 806 are formed on the upper surface of the firstsubstrate 801 in stripe at predetermined intervals, and a dielectriclayer 807 is formed so as to cover the address electrodes 806 and theupper surface of the first substrate 801. Partitioning walls 808 areprovided upright between the respective address electrodes 806 on thedielectric layer 807 so as to extend along the respective electrodes806. The partitioning wall 808 includes those extending on both sides inthe width direction of the address electrodes 806 and those which extendin the direction orthogonal to the address electrode 806.

The areas partitioned by the partitioning walls 808 are theelectric-discharge chambers 805.

Phosphors 809 is arranged in the electric-discharge chambers. Thephosphors 809 emits fluorescent light in any one of red (R), green (G),and blue (B). Red phosphors 809R is arranged on the bottom of the redelectric-discharge chamber 805R, green phosphors 809G is arranged on thebottom of the green electric-discharge chamber 805G, and blue phosphors809B is arranged on the bottom of the blue electric-discharge chamber805B, respectively.

A plurality of display electrodes 811 are arranged in stripe atpredetermined intervals in the direction orthogonal to the addresselectrodes 806. Then, a dielectric layer 812 and a protective filmformed of MgO or the like are formed so as to cover these electrodes.

The first substrate 801 and the second substrate 802 are adhered so asto oppose to each other in a state in which the address electrodes 806and the display electrodes 811 are oriented orthogonally with respect toeach other. The address electrodes 806 and the display electrodes 811are connected to an AC power source, not shown.

Then, by supplying power to the respective electrodes 806, 811, thephosphors 809 is excited and emits light in the electric-dischargedisplay unit 803, whereby color display is enabled.

In this embodiment, the liquid droplet ejection apparatus 1 can be usedfor forming the address electrodes 806, the display electrodes 811, andthe phosphors 809. A step of forming the address electrodes 806 on thefirst substrate 801 will be shown.

In this case, the following steps are carried out in a state in whichthe first substrate 801 is placed on the set table 21 of the liquiddroplet ejection apparatus 1.

Liquid material (functional liquid) containing material for formingconductive film wiring is received as functional liquid droplets in theaddress electrode forming areas by the functional liquid dropletejection head 42. The liquid material is carrier medium includingconductive particles such as metal dispersed therein as material forforming conductive film wiring. The conductive particles used here maybe metal particles containing gold, silver, copper, palladium, ornickel, or conductive polymer or the like.

After having terminated replenishment of liquid material for all theaddress electrode forming areas to be replenished, the liquid materialafter ejection is dried, and hence the carrier medium contained in theliquid material is dried off, whereby the address electrodes 806 areformed.

Although the formation of the address electrodes 806 is exemplifiedabove, the display electrodes 81 and the phosphors 809 can also beformed by carrying out the above-described respective steps.

In the case of the display electrode 811, the liquid material(functional liquid) containing the material for conductive film wiringis received as the functional liquid droplets in the display electrodeforming areas as in the case of the address electrodes 806.

In the case of the phosphors 809, the liquid material (functionalliquid) containing phosphors corresponding to the respective colors (R,G, B) are ejected as liquid droplets from the functional liquid dropletejection heads 42 and received in the electric-discharge chamber incorresponding color.

FIG. 22 is a cross-sectional view showing a principal portion of theelectron discharge device (also referred to as FED device or SED device:hereinafter, referred to simply as a display device 900). In the samedrawing, the display device 900 is shown partly in cross-section.

The display device 900 includes a first substrate 901 and a secondsubstrate 902 arranged so as to oppose to each other, and a fieldemission display unit 903 formed therebetween. The field emissiondisplay unit 903 includes a plurality of electron discharge sections 905arranged in a matrix manner.

First element electrodes 906 a and second element electrodes 906 b areformed orthogonally to each other on the upper surface of the firstsubstrate 901. Portions partitioned by the first element electrodes 906a and the second element electrodes 906 b are formed with conductivefilms each formed with a gap 908. In other words, a plurality of theelectron discharge sections 905 are composed of the first elementelectrode 906 a, the second element electrode 906 b and the conductivefilms 907. The conductive films 906 are formed of palladium oxide (PdO)or the like, and the gaps 908 are formed by shaping or the like afterthe conductive film 907 are formed.

An anode electrode, which opposes the cathode electrodes, is formed onthe lower surface of the second substrate 902. A bank portion 911 in areticular pattern is formed on the lower surface of the anode electrode909, and phosphors 913 is arranged in the respective openings 912 facingdownward and being surrounded by the bank portions 911 so as tocorrespond to the electron discharge sections. The phosphors emitsfluorescent light of any one of the colors of red (R), green (G), andblue (B), and the red phosphors 913R, the green phosphors 913G, and theblue phosphors 913B are arranged in the respective openings 912 in theabove-described predetermined pattern.

The first substrate 901 and the second substrate 902 are adhered to eachother with a minute gap formed therebetween. In this display device 900,electrons jumped out from the first element electrodes 906 a or thesecond element electrodes 906 b as the cathodes through the conductivefilms (gaps 908) 907 are excited by being hit at the phosphors 913formed on the anode electrode 909, whereby color display is enabled.

In this case as well, the first element electrodes 906 a, the secondelement electrode 906 b, the conductive films 907, and the anodeelectrode 909 can be formed by using the liquid droplet ejectionapparatus 1 as in the case of other embodiments, and the phosphors 913R,913G, 923B of respective colors may be formed using the liquid dropletejection apparatus 1.

The first element electrode 906 a, the second element electrode 906 band the conductive film 907 have a planar shape as shown in FIG. 23A.When forming these films, as shown in FIG. 23B, the bank portions BB isformed (photolithography method) while leaving spaces for forming thefirst element electrodes 906 a, the second element electrodes.906 b, andthe conductive films 907 in advance. Then, the first element electrodes906 a and the second element electrodes 906 b are formed (by the inkjetmethod with the liquid droplet ejection apparatus 1) at grooves formedby the bank portions BB, then the solvent is dried to form the film, andthen the conductive films 907 are formed (by the inkjet method with theliquid droplet ejection apparatus 1). Subsequently, after having formedthe conductive films 907, the bank portions BB are removed (ashingseparation), and then the procedure goes to the above-described shapingprocess. As in the case of the above-described organic EL device, it ispreferable to provide lyophilic property to the first substrate 901 andthe second substrate 902 to provide liquid repellent property to thebank portions 911, BB.

Other electro-optic device which may be contemplated includes devicesfor forming metal wiring, forming lens, forming resist, forming lightdiffusing material, and the like. By employing the above-describedliquid droplet ejection apparatus 1 for manufacture of the variouselectro-optic devices, various electro-optic devices can be manufactureefficiently.

1. An apparatus for ejecting a liquid droplet for drawing a pattern on awork having a plurality of drawing areas provided in the longitudinaldirection, the apparatus comprising: a suction table disposed in adrawing space for setting the work by suction; a delivering apparatusfor delivering the work intermittently for introducing the work onto thesuction table in a sagged state; a drawing means for drawing a patternon the work set by suction by driving the functional liquid dropletejection head to eject liquid droplet; a work receiving means forreceiving the drawn work in a sagged state from the suction table; and aflushing unit including a flushing box for receiving ejection from thefunctional liquid droplet ejection head located at least at one of thesagged portions of the work.
 2. The apparatus according to claim 1,wherein the work is provided with alignment marks for correcting thepositions of the respective drawing areas, and wherein an imagerecognition means for photographing the alignment marks and recognizingthe image and a θ-table for correcting the position in the horizontalplane of the drawing area with respect to the functional liquid dropletejection head are further provided.
 3. The apparatus according to claim2, wherein the flushing box is supported by the θ-table.
 4. Theapparatus according to claim 1, wherein the flushing box is formedcorresponding to the inclination of the sagged portion on the suctiontable side.
 5. The apparatus according to claim 1, wherein the workreceiving means winds the work.
 6. A work on which drawing is made bythe apparatus according to claim
 1. 7. The work according to claim 6,wherein the work is a flexible board having mounted thereon anelectronic part.
 8. A method of manufacturing an electro-optic devicecomprising forming a film formed portion with functional liquid dropleton the work using the apparatus according to claim
 1. 9. Anelectro-optical device having formed thereon a film forming portion withfunctional liquid droplet using the apparatus according to claim
 1. 10.An electronic equipment manufactured by the method of manufacturing anelectro-optic device according to claim
 8. 11. An electronic equipmenthaving mounted thereon the electro-optic device according to claim 9.